01098na  a2200265   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223372004000276373006700316373006100383373007400444374005700518374004800575375001100623377001400634400002800648670010200676670005400778KAC20162325320200916171134161103 b aznnnaabn          fa aaa      7 a00000004593531422isni  a(KRI)10169207  a(KISTI)ADPER00003172411 a한경훈,g韓暻薰,d1974-  c한국(국명)[韓國]0KSH20000101452nlsh  a화학 공학[化學工學]0KSH19980084672nlsh  a생물[生物]0KSH19970006102nlsh  a숭실대학교 환경화학공학과 (강사)s200803t200806  a광운대학교 화학공학과 (강사)s200803t200806  a서울대학교 공과대학 (박사후연구원)s20080901t20090901  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a강사(선생)[講師]0KSH19980072052nlsh  a남성  l한국어1 aHan, Kyounghoon,d1974-  aReal-time end-point and fault detection of plasma etching processes, (Seoul National Univ.), 2008  a한국연구자정보(KRI)uhttps://www.kri.go.kr