01059na  a2200253   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223372001700276373007100293373008600364374005700450374004800507375001100555377001400566400002400580670014700604670005400751KAC20170555320201109131921170207 b aznnnaabn          fa aaa      7 a00000004599800742isni  a(KRI)10183054  a(KISTI)ADPER00001753341 a육세진,g陸世鎭,d1974-  c한국(국명)[韓國]0KSH20000101452nlsh  a기계 공학[機械工學]0KSH19980184142nlsh  a입자공학  a한양대학교 공과대학 기계공학부 (부교수)s20080301  a삼성전자 반도체총괄 메모리사업부 (책임연구원)s200702t200712  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a교수(대학)[敎授]0KSH19980114932nlsh  a남성  l한국어1 aYook, Sejin,d1974-  aModeling, detection and protection schemes for extreme ultraviolet lithography (EUVL) mask carrier systems, (UMI Dissertation Services), c2007  a한국연구자정보(KRI)uhttps://www.kri.go.kr