01129na  a2200253   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372004600223373006400269373008600333373004600419374004800465374005700513375001100570377001400581400002600595670020000621670005400821KAC20180550920201012084719180129 b aznnnaabn          fa aaa      7 a00000004646272832isni  a(KRI)10105821  a(KISTI)ADPER00001969651 a이창우,g李昶雨,d1964-  c한국(국명)[韓國]0KSH20000101452nlsh  a물리학[物理學]0KSH19980143642nlsh  a국민대학교 나노전자물리학과 (교수)s19950301  a한국과학기술원 정보전자연구부 (별정직 연구원)s199312t199412  a한국진공학회 (편집위원)s200001  a교수(대학)[敎授]0KSH19980114932nlsh  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aLee, Changwoo,d1964-  aPhysical properties and thermal stabilities of tungsten nitride diffusion barrier produced by plasma enhanced chemical vapor deposition, (Korea Advanced Institute of Science and Technology), 1994  a한국연구자정보(KRI)uhttps://www.kri.go.kr