01211na  a2200277   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372004500223372005300268373007100321373007700392374004800469374005700517375001100574377002200585400002600607400002700633670014800660670005400808670007100862KAC20183453320220713145244180524 b aznnnaabn          fa aaa      7 a00000004650614292isni  a(KRI)10084670  a(KISTI)ADPER00000723321 a한승수,g韓丞洙,d1963-  c한국(국명)[韓國]0KSH20000101452nlsh  a컴퓨터[computer]0KSH19980009202nlsh  a전자 공학[電子工學]0KSH19980184202nlsh  a현대전자 메모리 연구소 (선임연구원)s199611t199708  a명지대학교 ICT융합대학 정보통신공학과 (교수)s20000301  a교수(대학)[敎授]0KSH19980114932nlsh  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어l영어1 aHan, Seungsoo,d1963-1 aHan, Seung-soo,d1963-  aReal-time In-situ plasma etch process monitoring for sensor based-advanced process control, (Institute of electronics engineers of Korea), 2011  a한국연구자정보(KRI)uhttps://www.kri.go.kr  a한국과학기술정보연구원(KISTI)uhttps://www.kisti.re.kr/