00767na  a2200217   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223373006000276374004800336375001100384377001400395400002300409670005400432670006300486KAC20184670620200416164239180622 b aznnnaabn          fa aaa      7 a00000004676367242isni  a(KRI)10114178  a(KISTI)ADPER00001961471 a이제원,g李濟原,d1969-  c한국(국명)[韓國]0KSH20000101452nlsh  a재료 공학[材料工學]0KSH19980184182nlsh  a인제대학교 나노시스템공학과 (교수)s2013  a교수(대학)[敎授]0KSH19980114932nlsh  a남성  l한국어1 aLee, Jewon,d1969-  a한국연구자정보(KRI)uhttps://www.kri.go.kr  a반도체 장비 실습, (인제대학교 출판부), 2019