00918na  a2200229   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223373008200276374005700358375001100415377001400426400002600440400002500466670014300491670005400634KAC20185306120201008110336180703 b aznnnaabn          fa aaa      7 a00000004677746092isni  a(KRI)10178311  a(KISTI)ADPER00002597441 a김종욱,g金鍾旭,d1985-  c한국(국명)[韓國]0KSH20000101452nlsh  a전자 공학[電子工學]0KSH19980184202nlsh  a한국전기전자재료학회a한국반도체및디스플레이장비학회  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aKim, Jongwook,d1985-1 aGim, Jong-uk,d1985-  aFabrication and characterization of silicon based films prepared by PECVD for OLED encapsulation and flash memory, (淸州大學校), 2013  a한국연구자정보(KRI)uhttps://www.kri.go.kr