00921na  a2200241   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223372005300276373005500329374005700384375001100441377001400452400002600466400002600492670010700518670005400625KAC20185426620200903102236180704 b aznnnaabn          fa aaa      7 a00000004677762682isni  a(KRI)10165423  a(KISTI)ADPER68021940051 a이창화,g李昌和,d1978-  c한국(국명)[韓國]0KSH20000101452nlsh  a화학 공학[化學工學]0KSH19980084672nlsh  a전기 공학[電氣工學]0KSH19980397922nlsh  a한국원자력연구원 (책임연구원)s201012  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aLee, Changhwa,d1978-1 aYi, Chang-hwa,d1978-  aCu electroless bottom-up filling techniques for ULSI interconnect fabrication, (서울대학교), 2006  a한국연구자정보(KRI)uhttps://www.kri.go.kr