00815na  a2200217   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372004600223372002000269374005700289375001100346377001400357400002700371670014500398670005400543KAC20185738920200728103534180709 b aznnnaabn          fa aaa      7 a00000004678115372isni  a(KRI)11318229  a(KISTI)ADPER82008393291 a권성률,g權成律,d1987-  c한국(국명)[韓國]0KSH20000101452nlsh  a물리학[物理學]0KSH19980143642nlsh  a박막물리학  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aKwon, Sungyool,d1987-  aLow dielectric constant SiCOH films deposited with PECVD and their application to semiconductor and biochip, (Sungkyunkwan University), 2019  a한국연구자정보(KRI)uhttps://www.kri.go.kr