00719na  a2200205   4500001001300000005001500013008004100028024002700069035001800096035002700114100002200141370004800163372005300211372002300264374005700287375001100344377001400355670009000369670005400459KAC20186249820200916105435180713 b aznnnaabn          fa aaa      7 a00000004678847872isni  a(KRI)10837190  a(KISTI)ADPER68011257921 a장해규,d1983-  c한국(국명)[韓國]0KSH20000101452nlsh  a기술 과학[技術科學]0KSH19990158492nlsh  a플라즈마공정  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어  aPlasma process monitoring with multivariate analysis, (Sungkyunkwan University), 2017  a한국연구자정보(KRI)uhttps://www.kri.go.kr