00742na  a2200217   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223372002000276373006400296374005700360375001100417377001400428400002800442670005400470KAC20186427220180716162244180716 b aznnnaabn          fa aaa      7 a00000004679117812isni  a(KRI)11502207  a(KISTI)ADPER82014078631 a심경배,g沈敬培,d1989-  c한국(국명)[韓國]0KSH20000101452nlsh  a전자 공학[電子工學]0KSH19980184202nlsh  a반도체공정  a성균관대학교 전자전기컴퓨터공학과s20150801  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aShim, Gyeongbae,d1989-  a한국연구자정보(KRI)uhttps://www.kri.go.kr