00812na  a2200217   4500001001300000005001500013008004100028024002700069035001800096035002700114100002200141370004800163372005300211372002000264374005700284375001100341377001400352400002500366670014900391670005400540KAC20187524920200821142308180723 b aznnnaabn          fa aaa      7 a00000004680265732isni  a(KRI)11272809  a(KISTI)ADPER68028015391 a김정식,d1988-  c한국(국명)[韓國]0KSH20000101452nlsh  a재료 공학[材料工學]0KSH19980184182nlsh  a신소재공학  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aKim, Jungsik,d1988-  aAttenuated phase shift mask using platinum phase shifter for high numerical aperture extreme ultraviolet lithography, (Hanyang University), 2019  a한국연구자정보(KRI)uhttps://www.kri.go.kr