00750na  a2200205   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372005300223374005700276375001100333377001400344400002800358670010400386670005400490KAC20188322120200727172101180727 b aznnnaabn          fa aaa      7 a00000004681095552isni  a(KRI)11090464  a(KISTI)ADPER68009053211 a홍성철,g洪成哲,d1985-  c한국(국명)[韓國]0KSH20000101452nlsh  a재료 공학[材料工學]0KSH19980184182nlsh  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aHong, Seongchul,d1985-  a(The) study of photon shot noise effect in EUVL by using attenuated PSM, (Hanyang University), 2017  a한국연구자정보(KRI)uhttps://www.kri.go.kr