00864na  a2200229   4500001001300000005001500013008004100028024002700069035001800096035002700114100003400141370004800175372004000223373008600263374005700349375001100406377001400417400002500431670008900456670005400545670003500599KAC2020E128720221019163957200819 b aznnnaabn          fa aaa      7 a00000004940096542isni  a(KRI)10163910  a(KISTI)ADPER00000801401 a임종민,g林鍾旻,d1970-  c한국(국명)[韓國]0KSH20000101452nlsh  a금속[金屬]0KSH19980027352nlsh  a인하대학교 금속공학및재료공학부 (박사후과정연구원)s200405  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aLim, Jongmin,d1970-  a플라즈마와 UV/O₃를 이용한 반도체 표면세정, (仁荷大學校), 2004  a한국연구자정보(KRI)uhttps://www.kri.go.kr  aKISTIuhttps://www.kisti.re.kr