00901na  a2200241   4500001001300000005001500013008004100028024002700069035002700096035001800123100003400141370004800175372005300223372005300276372001400329374005700343375001100400377001400411400002300425670012200448670005400570670003500624KAC2022E465220221212110035221212 b aznnnaabn          fa aaa      7 a00000004788233732isni  a(KISTI)ADPER0000029866  a(KRI)101945581 a이인환,g李仁煥,d1982-  c한국(국명)[韓國]0KSH20000101452nlsh  a재료 공학[材料工學]0KSH19980184182nlsh  a전자 공학[電子工學]0KSH19980184202nlsh  a반도체  a연구원(연구자)[硏究員]0KSH19980377142nlsh  a남성  l한국어1 aYi, Inhwan,d1982-  aEllipsometry를 이용한 Low-k SiOCH 박막의 유전특성에 관한 연구, (한국전기전자재료학회), 2008  a한국연구자정보(KRI)uhttps://www.kri.go.kr  aKISTIuhttps://www.kisti.re.kr