00000nz  a2200000n  4500
001  KSH1998003244
005  20000804125359
008  980429 n azknn|abn          |a a|a    | 
150  ▼a고주파 방전[高周波放電]▲
450  ▼wr▼i영어▼ahigh frequency discharge▲
550  ▼wg▼a방전[放電]▲
550  ▼wg▼a전기 화학[電氣化學]▲
550  ▼a고주파[高周波]▲
550  ▼a원자외선[遠紫外線]▲