국가전거
저자 전거 검색
기사
Formation and technology of SiOF films as intermetal dielectric by helicon wave plasma CVD
표제/저자사항
Formation and technology of SiOF films as intermetal dielectric by helicon wave plasma CVD / Chi Kyu Choi, Kwang Man Lee, Duk-soo Kim, Hong-Young Chang
형태사항
p. 65-76; 27 cm
주기사항
수록자료: 基礎科學硏究-濟州大學校 基礎科學硏究所. 濟州大學校 基礎科學硏究所. 8卷 1號(1995), p. 65-76 8:1<65 상세보기 ISSN 1225-3200
저자: Chi Kyu Choi, Department of Physics, Cheju National University
저자: Kwang Man Lee, Department of Electronic Engineering, Cheju National University
저자: Duk-soo Kim, Department of Chemistry, Cheju National University
저자: Hong-Young Chang, Department of Physics, Korea Advanced Institute of Science and Technology
저자: Chi Kyu Choi, Department of Physics, Cheju National University
저자: Kwang Man Lee, Department of Electronic Engineering, Cheju National University
저자: Duk-soo Kim, Department of Chemistry, Cheju National University
저자: Hong-Young Chang, Department of Physics, Korea Advanced Institute of Science and Technology
출처
국립중앙도서관 바로가기
MARC 보기
001KMO201509136
00520150303111639
007ta
008150107s2001 gak 100 kor
0490 ▼lEM6076783▼lEM6076784▼c2▼fSY
05201▼a470▼b15-3
056 ▼a470▼26
08201▼a570▼223
24500▼a생명이란 무엇인가? :▼b생명·환경·문화 8월 대 토론회 /▼d주최: 토지문화재단 ;▼e주관: 한국생명윤리학회,▼e토지문화관
260 ▼a원주 :▼b토지문화재단,▼c2001
300 ▼a81 p. ;▼c30 cm
500 ▼a일시 및 장소: 2001년 8월 18일(토) ~ 19일(일), 토지문화관
504 ▼a참고문헌 수록
650 8▼a생명 과학[生命科學]
650 8▼a생명론[生命論]
710 ▼a토지문화재단
710 ▼a한국생명윤리학회
710 ▼a토지문화관
9501 ▼a가격불명
담당부서 : 국가서지과 (02-590-6339)
