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기사
A study on the influence of carbon contents on dielectric constant of SiOC films by thermal treatment = 탄소가 첨가된SiO₂박막의 열처리에 따른 탄소 농도 영향에 대한 연구
표제/저자사항
A study on the influence of carbon contents on dielectric constant of SiOC films by thermal treatment = 탄소가 첨가된SiO₂박막의 열처리에 따른 탄소 농도 영향에 대한 연구 / Chang Sil Yang, Young-Hun Yu, Kwang-Man Lee, Heon-Ju Lee, Chi Kyu Choi
형태사항
p. 1-6; 27 cm
주기사항
수록자료: 基礎科學硏究-濟州大學校 基礎科學硏究所. 濟州大學校 基礎科學硏究所. 15卷 1號(2002), p. 1-6 15:1<1 상세보기 ISSN 1225-3200
저자: Chang Sil Yang, Department of Physics Cheju National University
저자: Young-Hun Yu, Department of Physics Cheju National University
저자: Kwang-Man Lee, Faculty of Electrical and Electronic Engineering, Research Institute of Advanced Technology, Cheju National University
저자: Heon-Ju Lee, Faculty of Mechanical, Energy and Production Egineering, Research Institute of Advanced Technology, Cheju National University
저자: Chi Kyu Choi, Department of Physics Cheju National University
저자: Chang Sil Yang, Department of Physics Cheju National University
저자: Young-Hun Yu, Department of Physics Cheju National University
저자: Kwang-Man Lee, Faculty of Electrical and Electronic Engineering, Research Institute of Advanced Technology, Cheju National University
저자: Heon-Ju Lee, Faculty of Mechanical, Energy and Production Egineering, Research Institute of Advanced Technology, Cheju National University
저자: Chi Kyu Choi, Department of Physics Cheju National University
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007ta
008150107s2001 gak 100 kor
0490 ▼lEM6076783▼lEM6076784▼c2▼fSY
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056 ▼a470▼26
08201▼a570▼223
24500▼a생명이란 무엇인가? :▼b생명·환경·문화 8월 대 토론회 /▼d주최: 토지문화재단 ;▼e주관: 한국생명윤리학회,▼e토지문화관
260 ▼a원주 :▼b토지문화재단,▼c2001
300 ▼a81 p. ;▼c30 cm
500 ▼a일시 및 장소: 2001년 8월 18일(토) ~ 19일(일), 토지문화관
504 ▼a참고문헌 수록
650 8▼a생명 과학[生命科學]
650 8▼a생명론[生命論]
710 ▼a토지문화재단
710 ▼a한국생명윤리학회
710 ▼a토지문화관
9501 ▼a가격불명
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