학위논문
Plasma process monitoring with multivariate analysis
표제/저자사항 Plasma process monitoring with multivariate analysis / Haegyu Jang
발행사항 Seoul : Sungkyunkwan University, 2017
형태사항 106 pages : color illustrations ; 30 cm
주기사항 Adviser: Heeyeop Chae
Thesis(Ph.D.) -- Graduate School, Sungkyunkwan University, Department of Nano Science and Technology, 2017
Bibliography: pages 103-106
분류기호 한국십진분류법-> 530듀이십진분류법-> 620.5
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