학위논문
Iron contamination in silicon and its impact on ultra-thin gate oxide integrity
표제/저자사항 Iron contamination in silicon and its impact on ultra-thin gate oxide integrity / by Byoung D. Choi
발행사항 Ann Arbor, MI: UMI Dissertation Services, 2001
형태사항 xi, 86 p.: ill.; 23 cm
주기사항 Thesis(Ph.D.) -- Arizona State University, 2001.
Includes bibliographical references (p. [78]-86).
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