전자책
Process temperature dependence of Al<sub>2</sub>O<sub>3</sub> film deposited by thermal ALD as a passivation layer for c-Si solar cells
표제/저자사항 Process temperature dependence of Al<sub>2</sub>O<sub>3</sub> film deposited by thermal ALD as a passivation layer for c-Si solar cells / Oh, Sung-Kwen Shin, Hong-Sik Jeong, Kwang-Seok Li, Meng Lee, Horyeong Han, Kyumin Lee, Yongwoo Lee, Ga-Won Lee, Hi-Deok
발행사항 서울 : 대한전자공학회, 2013
형태사항 PDF8 p.
주기사항 간행빈도: 기타 간행빈도
수록자료: JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE ISSN 1598-1657
표준번호/부호 UCI  G701:C-00068110651
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