전자책
Study on the surface characteristics of parylene-C films in inductively coupled O₂/CF₄ gas plasma
표제/저자사항 Study on the surface characteristics of parylene-C films in inductively coupled O₂/CF₄ gas plasma / Ham, Yong-hyun Baek, Kyu-Ha [1961-] Park, Kun-Sik [1969-] Shin, Hong-sik [1983-] Yun, Ho-jin Kwon, Kwang-Ho [1959-] Do, Lee-Mi [1960-]
발행사항 Seoul : The Korea Information Display Society, 2009
형태사항 PDFp. 1399-1401
주기사항 서지: Includes bibliographical references
수록자료: Proceedings of...Korean information display society conference 2009 p. 1399-1401
다른 형태자료: ISSN 1229-6449 상세보기
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